1GetasanGetasan 17011694 2GetasanJetak 12031430 3Tengaran Tengaran 48114513 4SusukanSusukan29922942 5KaliwunguSuruh16511530 6SuruhDadapayam56902720 7PabelanPabelan20121951 8PabelanSemowo16541653 9TuntangTuntang11201081 10TuntangGedangan 25902221 11Banyubiru Banyubiru12311110 12Banyubiru Jambu28742782 13JambuSumowono23212723 14Sumowono Ambarawa22911840 15AmbarawaDuren35033741 16Bandungan Jimbaran20752203 17Bawen Bawen17501540 18Bawen Bringin30133311 19BringinBancak26202926 20BancakBergas14201441 21Bergas 44753756 22Pringapus39923501 23Ungaran Barat19112052 24Ungaran Barat26522121 25Ungaran Timur19722010 26Ungaran Timur15712180